|
Users and Staff
Arthur J. McGinnis and K. Jagannadham, North Carolina State University
Thomas R. Watkins, ORNL
Background
- Diamond has the highest known thermal conductivity as well as high hardness
- Interest exists to utilize diamond coatings in various applications such as heat spreaders in electronic device
- Utilization of these coatings can be limited by poor adhesion due in part to residual stresses
- Insertion of an appropriate intermediate layer between the coating and substrate can be used to reduce the residual stresses arising from thermal expansion mismatch
- X-ray diffraction and Raman spectroscopy were used to characterize the residual stresses
Results
|
Multilayer coating processing:
- A layer of diamond islands deposited via hot filament CVD; Mo2C also formed by carburization of Mo during this deposition
- Interposing layer of AlN deposited via pulsed laser PVD
- Coating polished until the underlying layer of diamond islands was exposed
- A continuous top layer of diamond deposited
|
| Hydrostatic stresses measured by X-ray diffraction and Macro-Raman spectroscopy. |
|
Sample | Diamond Layer Thickness (µm) |
Mean Hydrostatic Stress (GPa) |
| (321) Mo# | (213) Mo2C# | Diamond´ |
| Multilayer Coating | 5 | - 0.07 (0.06)* | 0.49 (0.06) | -4.5 |
| Single layer Diamond |
8.5 | - 0.08 (0.07) | 0.53 (0.05) | -4.5 |
# X-ray diffraction
´ Macro Raman data
*( ) Denotes standard deviation
|
- Sign of residual stresses consistent with thermal expansion mismatch.
- Current results indicate no stress reduction benefit of interposing AlN layer despite the observed improvement in adhesion (i.e., lack of delamination).
Publication
- A. J. McGinnis, T. R. Watkins and K. Jagannadham, "Residual Stresses in a Multilayer System of Coatings," in preparation for Advances in X-ray Analysis, V. 41., 1998.
|