Residual Stresses in Mo2C/Diamond Coatings

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Users and Staff
    Arthur J. McGinnis and K. Jagannadham, North Carolina State University
    Thomas R. Watkins, ORNL
Background
  • Diamond has the highest known thermal conductivity as well as high hardness
  • Interest exists to utilize diamond coatings in various applications such as heat spreaders in electronic device
  • Utilization of these coatings can be limited by poor adhesion due in part to residual stresses
  • Insertion of an appropriate intermediate layer between the coating and substrate can be used to reduce the residual stresses arising from thermal expansion mismatch
  • X-ray diffraction and Raman spectroscopy were used to characterize the residual stresses

Results
Schematic cross-section of sample

Multilayer coating processing:
  • A layer of diamond islands deposited via hot filament CVD; Mo2C also formed by carburization of Mo during this deposition
  • Interposing layer of AlN deposited via pulsed laser PVD
  • Coating polished until the underlying layer of diamond islands was exposed
  • A continuous top layer of diamond deposited

Hydrostatic stresses measured by X-ray diffraction and Macro-Raman spectroscopy.
Sample Diamond Layer Thickness (µm) Mean Hydrostatic Stress (GPa)
(321) Mo# (213) Mo2C# Diamond´
Multilayer Coating5- 0.07 (0.06)*0.49 (0.06)-4.5
Single layer Diamond 8.5- 0.08 (0.07) 0.53 (0.05)-4.5

 #     X-ray diffraction
 ´     Macro Raman data
 *( )  Denotes standard deviation

  • Sign of residual stresses consistent with thermal expansion mismatch.
  • Current results indicate no stress reduction benefit of interposing AlN layer despite the observed improvement in adhesion (i.e., lack of delamination).
Publication
  • A. J. McGinnis, T. R. Watkins and K. Jagannadham, "Residual Stresses in a Multilayer System of Coatings," in preparation for Advances in X-ray Analysis, V. 41., 1998.

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Acknowledgments

URL: http://www.html.ornl.gov/rsuc/diam.html